The 2-dimensional micro scanner integrated with PZT thin film actuator

Abstract

The new silicon micromachined optical scanner integrated with a PZT thin film actuator has been developed for a super miniaturized scanning type optical sensor. The scanner driven by the PZT thin film microactuator is able to scan a light beam in two directions with a scanning angle of 4.7 degree. The size of the scanner is 2 mm/spl times/4 mm/spl times/0.4 mm. The design of the scanner used the design method including air damping consideration. The measurement value of the resonant frequency was in good agreement with the calculated value using this design method. This design method is useful to predict the dynamic characteristics of a microminiaturized scanner integrated with a PZT thin film actuator.