Concepedia

Studies on SiO2–SiO2 bonding with hydrofluoric acid. Room temperature and low stress bonding technique for MEMS

Hiroyuki Nakanishi, T. Nishimoto, Ryuta Nakamura, A. Yotsumoto, T. Yoshida, Sunao Shoji

Sensors and Actuators A Physical · 2000 · 76 citations · 2 references

DOI

Concepts

References

2

Silicon fusion bonding for fabrication of sensors, actuators and microstructures

Philip W. Barth · Sensors and Actuators A Physical · 1990 · 174 citations

, , +12

Absolute Cross Sections for the Production of <sup>18</sup>F via the <sup>18</sup>O(p, n)<sup>18</sup>F Reaction

Radiochimica Acta · 1979 · 160 citations

, , +9