IEEE Transactions on Instrumentation and Measurement · 1997 · 23 citations · 7 references
EngineeringElectrical EngineeringMaterials ScienceMicroelectronicsSemiconductor DevicesThin FilmsIntegrated Circuit DesignIntegrated Circuit DevicesSemiconductor Device MaterialsSemiconductor Thin FilmsThermal Properties Of SemiconductorsThin Film Electrical PropertiesCmos Fabrication ProcessesElectrical PropertiesElectrical Properties AnalysisFabricationFabrication ProcessesThermal Effects In Integrated CircuitsThermal Management Of Semiconductor Devices
This paper gives an overview of the development of thin-film multijunction thermal converters (FMJTC's) at the National Institute of Standards and Technology (NIST). A historical perspective of film thermal converters is presented, followed by descriptions of the motivation, fabrication processes, physical characteristics, and the electrical properties of the FMJTC's produced at NIST. Integrated micropotentiometers that incorporate FMJTC's and thermal converters, produced by an alternative fabrication technology using a CMOS foundry, are also described. The paper concludes with a report on the present status of the FMJTC project and future directions.
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Multijunction thin-film radiation thermopile sensors
W. Meinel, Dipl-Phys J. Müller, Dipl-Phys E. Kessler et al. · Measurement · 1988 · 15 citations