Polymer‐Reinforced, Aligned Multiwalled Carbon Nanotube Composites for Microelectromechanical Systems Applications

Abstract

Aligned multiwalled carbon nanotube (MWNT)–polymer composites are synthesized for use in microelectromechanical systems (MEMS) applications. Indentation and bending tests reveal that the elastic modulus of the MWNT–MEMS devices is promoted by a factor of 20. Dynamic bending experiments show that MWNT–MEMS devices can be driven at a lower pull-in voltage compared with classical devices. Complex and delicate MWNT–MEMS devices can also be fabricated (see Figure).