Concepedia

Publication | Closed Access

Proton beam writing of microstructures in silicon

DOI

21

Citations

30

References

2005

Year

Mark B. H. Breese, Ee Jin Teo, D. Mangaiyarkarasi, F. Champeaux, Andrew A. Bettiol, Daniel John Blackwood
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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