Publication | Closed Access
Patterning of Si nanowire array with electron beam lithography for sub-22nm Si nanoelectronics technology
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Citations
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References
2013
Year
Electrical EngineeringEngineeringElectron-beam LithographyBeam LithographyNanotechnologyNanoelectronicsApplied PhysicsSemiconductor Device FabricationNanolithographyNanofabricationSilicon On InsulatorMicroelectronicsSi Nanowire ArrayNanolithography MethodElectron Beam Lithography
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