Three dimensional micro integrated fluid systems (MIFS) fabricated by stereo lithography

Abstract

A new type of real three dimensional micro fabrication using micro stereo lithography and electro plating named the "IH process" has been proposed and demonstrated by the authors. This process is applicable to both polymer and metal microstructures. In the first part of this paper, a new type of micro integrated fluid system (MIFS) whose concept is a hybrid system combined with the conventional silicon process and the new IH process are discussed. A three dimensional MIFS is prototyped successfully. Secondly, a special conductive UV solidified polymer is developed by the authors, together with an electrostatic microactuator made of it by using the IH process. The thirdly, the micro solidification process is carefully observed and a theoretical model of this process is proposed. The simulation results based on this model show good agreement with the experimental results.