High-reflectivity, high-<i>Q</i> micromechanical membranes via guided resonances for enhanced optomechanical coupling

Abstract

Using Fano-type guided resonances (GRs) in photonic crystal (PhC) slab structures, we numerically and experimentally demonstrate optical reflectivity enhancement of high-Q SiNx membrane-type resonators used in membrane-in-the-middle optomechanical (OM) systems. Normal-incidence transmission and mechanical ringdown measurements of 50-nm-thick PhC membranes demonstrate GRs near 1064 nm, leading to a ∼4 × increase in reflectivity while preserving high mechanical Q factors of up to ∼5 × 106. The results would allow improvement of membrane-in-the-middle OM systems by virtue of increased OM coupling, presenting a path towards ground state cooling of such a membrane and observations of related quantum effects.