Conformal Transparent Conducting Oxides on Black Silicon

Abstract

Black silicon with aspect ratios up to 10 and an average optical reflectance of only 2.5% over the whole absorbing spectral range was covered perfectly conformal with a transparent conductive oxide. The thin film was deposited by thermal ALD and exhibited a resistivity of 1.1 Ohm cm. This concept promises a new design for an efficient heterojunction silicon solar cell.