Publication | Open Access
Fabrication at wafer level of miniaturized gas sensors based on SnO2 nanorods deposited by PECVD and gas sensing characteristics
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Citations
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References
2010
Year
Materials ScienceSno2 NanorodsEngineeringSensorsNanomaterialsNanotechnologyWafer LevelGas SensorApplied PhysicsSensor DesignGas DetectionNanosensorPorous SensorElectrochemical Gas SensorGas Sensors
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