Out of plane motion of assembled microstructures using a single-mask SOI process

Abstract

We demonstrate out-of-plane motion of microstructures assembled from parts fabricated in a single-mask silicon-on-insulator (SOI) process. Compliant microgrippers used during assembly, in-plane electrostatic actuators, sockets and rotation mechanisms are all defined in the same mask. Advantages of this process include high fabrication yield and very quick fabrication time. We further report on three accomplishments: (1) new rigid sockets, (2) compliant, nonelectrically-actuated microgrippers that pick up parts and automatically rotate them 90/spl deg/ out-of-plane, and (3) out-of-plane rotation of assembled structures using in-plane electrostatic actuators, demonstrating 17/spl deg/ of static mechanical rotation to date.