IEEE Photonics Technology Letters · 1999 · 16 citations · 3 references
EngineeringMaterials EngineeringMaterials ScienceMicrofabricationOptical MaterialsPhotonicsFiber OpticsIntegrated Circuit FabricationIntegrated OpticsMask FabricationOptical FibersPhotonic Integrated CircuitsFabricationFiber-to-chip CouplingIntegrated WaveguidesPolymer WaveguidesSingle-mode FibersSingle-mode Optical FibersWaveguide FabricationWaveguide Integration
A fabrication process for high precision passive fiber chip coupling is presented. The difficulties of structuring highly nonplanar surfaces were solved by using an electrophoretic photoresist and introducing additional structures to prevent wide holes. The method involves only a single lithographic step for structuring the polymer waveguide and fiber aligning structures in Si and thereby minimizing the horizontal displacement. The loss due to fiber displacement is about 0.7 dB per front face.
3
Design concept for singlemode polymer waveguides
G. Fischbeck, R. Moosburger, Michael J. Topper et al. · Electronics Letters · 1996 · 64 citations
Natural Sciences, Materials Engineering, Materials Science +14