Selection of internal standard for determination of boron and phosphorus by ICP-MS in silicon photovoltaic materials

Abstract

A single-chamber autoclave with a heating plate was used for the acid dissolution of quartz and metallic silicon. Analysis was performed by ICP-MS. Comparison of 6 Li, 7 Li, 115 In, 35 Cl and 37 Cl+ 36 Ar 1 H was carried out for selecting the best internal standard taking into account instrumental drift. The selection criteria are discussed. 35 Cl was selected as the internal standard.