A pure single-walled carbon nanotube thin film based three-terminal microelectromechanical switch

Abstract

The electrical and physical properties of pure single-walled carbon nanotube thin films deposited through a layer-by-layer-self-assembly process are discussed. The film thickness was proportional to the number of dipping cycles. The film resistivity was estimated as 2.19×10−3 Ω cm after thermal treatment processes were performed. The estimated specific contact resistance to gold electrodes was 6.33×10−9 Ω m2 from contact chain measurements. The fabricated three-terminal microelectromechanical switch using these films functioned as a beam for multiple switching cycles with a 4.5 V pull-in voltage. This switch is believed to be a promising device for low power digital logic applications.