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CAEMEMS: an integrated computer-aided engineering workbench for micro-electro-mechanical systems
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2002
Year
Unknown Venue
EngineeringIndustrial EngineeringMechanical EngineeringMicroelectromechanical SystemsMicro-electro-mechanical SystemsComputer-aided DesignMechatronic SystemMicro-electromechanical SystemMems CadComputer-aided EngineeringSystems EngineeringModeling And SimulationMems DatabasesMechanical DesignMems SimMechatronicsComputer EngineeringMicrosystems EngineeringManufacturing SystemsElectronic-mechanical SystemProcess Simulation ModelMechanical Systems
A summary of a proposed computer-aided engineering system for micro-electro-mechanical systems is presented. The system will take advantage of existing high-level integrated mechanical engineering software tools and add application-specific software for the system to function as a MEMS-specific designers' workbench environment. The system, called CAEMEMS, will include database structures (MEMS Databases); a process modeler that can model MEMS-relevant process sequences (MEMS CAD); and a device modeler that can perform finite-element simulations, link individual devices together through appropriate matrix operations, and perform simulations of entire mechanical systems (MEMS Sim).< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>