Publication | Closed Access
Field acceleration for oxide breakdown-can an accurate anode hole injection model resolve the E vs. 1/E controversy?
110
Citations
4
References
2002
Year
Unknown Venue
ReliabilityElectrical EngineeringReliability EngineeringEngineeringField AccelerationOxide LifetimeGate Oxide ReliabilityStress-induced Leakage CurrentBias Temperature InstabilityHardware ReliabilityApplied PhysicsTime-dependent Dielectric BreakdownCircuit ReliabilityAnode Hole InjectionDevice ReliabilityMicroelectronics
A simple model, based on the concept of Anode Hole Injection, explains a number of puzzling measurements of oxide lifetime as a function of applied voltage. We provide systematic explanations of these measurements, and explore its implications for gate oxide reliability.
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