Sensors and Actuators B Chemical · 2010 · 120 citations · 16 references
EngineeringMaterials EngineeringMaterials ScienceSensorsSurface ScienceThin FilmsCapacitive SensingChemical Vapor DepositionHumidity SensorsMoisture TransportRelative HumiditySensor MaterialsCapacitive Humidity SensingCapacitive Humidity SensorsHumidity SensingHumidity Sensing MaterialsHumidity Sensor MaterialsSiliconThin-film Humidity Sensors
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