Instrumentation Developments in Atom Probe Tomography: Applications in Semiconductor Research

Joe Bunton, Dan Lenz, JD Olson, Keith Thompson, Robert M. Ulfig, Donald R. Larson, Thomas F. Kelly

Microscopy and Microanalysis · 2006 · 14 citations · 0 references

Concepts

Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006