Concepedia

Elimination of Silicon Electromigration in Contacts by the use of an Interposed Barrier Metal

Paolo A. Gargini, Chien-Wen Tseng, M. H. Woods

Reliability physics · 1982 · 23 citations · 0 references

Concepts

EngineeringElectrical EngineeringMaterials ScienceElectronic MaterialsMicroelectronicsSemiconductor DevicesIntegrated Circuit DesignIntegrated Circuit FabricationInterface EngineeringMetal-semiconductor ContactsSemiconductor InterfacesWafer BondingContact EngineeringElectromigrationElectromigration ReliabilityOhmic ContactsSilicon Interfaces