Removal of Electrically Active Defects in Silicon by 340 MeV Xe ion Bombardment - Concepedia

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Removal of Electrically Active Defects in Silicon by 340 MeV Xe ion Bombardment

13

Citations

4

References

1995

Year

I. V. Antonova, A. A. Karanovich, A. V. Rybin, S. S. Shaĭmeev, H. Klose

physica status solidi (a)

Electrical EngineeringIon ImplantationEngineeringApplied PhysicsSemiconductor Device FabricationElectrically Active DefectsIon EmissionSilicon On InsulatorMicroelectronicsSilicon Debugging

References

	Year	Citations

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