High-resolution color organic light-emitting diode microdisplay fabrication method

Abstract

We report experimental results on the evaluation of a sealing technique for organic light emitting diodes (OLEDs) used for high-resolution color microdisplay applications. Based on production and processing requirements for active matrix OLEDs (AMOLEDs) on silicon, the sealing process must protect the device against moisture and oxygen, not only during operation and storage but also during production. A conformal polymer/metal(oxide)/polymer multi-layer technology was selected for this purpose. AMOLED test structures were produced and tested with and without sealing under ambient conditions as well as in water. The applied sealing process was shown to be compatible with all steps of the OLED-based microdisplay production of eMagin Corporation. Our results confirm that encapsulating AMOLEDs with the described process leads to increased stability, both under operation as well as for storage purposes.