Numerical analysis of two dimensional thin film resonators

Abstract

In order to gain a better understanding of thin-film resonators fabricated at microwave frequencies a two-dimensional numerical analysis (finite-difference) formalism was derived and implemented. The formalism allows for arbitrary crystal anisotropy, rectangular material discontinuities, and two-dimensional variations in the thickness and width dimensions. Resonators are assumed to be of infinite extent in one dimension. The formalism has been extended to include additional electrodes for two-port devices such as monolithic filters. Computed results are given for aluminum nitride resonators and filters having finite thickness metallization.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>