FABRICATION OF Si NANOCOLUMNS AND Si SQUARE SPIRALS ON SELF-ASSEMBLED MONOLAYER COLLOID SUBSTRATES

Abstract

Amorphous silicon nanocolumns, square nanospirals, and multilayer spiral/column rods are fabricated on bare Si substrates and monolayer colloid substrates by glancing angle deposition. The grown films are studied by scanning electron microscopy and transmission electron microscopy. The size of the deposited Si columns and spirals increases with the size of colloid particles for fixed incident angle of deposition flux. The feasibility of fabricating separated, well-ordered square spirals provides a cost effective and simple way to fabricate photonic crystals.