Novel Electroexplosive Device Incorporating a Reactive Laminated Metallic Bridge

Abstract

The description and characterization of a novel, low e ring-current, semiconductor-based, scaleable monolithic electroexplosive device is presented. The device consists of a metallic (palladium) bowtie-shaped heating element, which has been selectively coated with a reactive metal (zirconium)to enhance ignition of a conventional pyrotechnic mix. Integrated diodes provide protection against electro-static discharge events. The device was specie cally cone gured to allow ease of interconnect by wirebonds, conductive epoxy, or solder. The structure was fabricated with conventional microelectronic techniques that allow for very economical manufacturing. Extensive design validation testing was performed. Parts with 0.5A/10 s no-e re at 99.999% reliability/95% cone dence and function time to peak pressure of <1 ms were demonstrated.