Recent investigations on BAW resonators at cryogenic temperatures

Abstract

This work presents the results of investigations on different aspects of cryogenic operation of BAW resonators. For the quartz crystal resonators the losses mechanisms, the temperature sensitivity, the amplitude-frequency effect are described for liquid helium temperatures. The corresponding problems are discussed. To overcome some of these problems, the possible solution of operation at higher modes is considered. Some of these higher modes exhibit outstanding quality factors. The highest (for BAW resonators) quality factor value and quality factor-frequency product are measured for the 11th and 13th overtones respectively. In addition, two LGT resonators have been characterized in a wide temperature range. Finally, some preliminary results on utilization of cryogenic quartz resonators as a part of a frequency stabilization closed loop system are given.