Publication | Closed Access
A design flow for micromachined electromechanical systems
19
Citations
4
References
1999
Year
Industrial DesignElectrical EngineeringSeveral Design ExamplesEngineeringMicromachinesMicrofabricationMechanical EngineeringMechanical SystemsMicroelectromechanical SystemsDesign FlowElectromechanical SystemsElectronic-mechanical SystemMicroactuatorMicrofluidicsIntegrated Microelectromechanical SystemsMicro-electromechanical SystemMicroelectronics
I present a design flow for integrated microelectromechanical systems (MEMS), with particular focus on electromechanical devices. Several design examples of real-world devices are given.
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