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Integrated Complementary Resistive Switches for Passive High-Density Nanocrossbar Arrays
123
Citations
16
References
2010
Year
Crs CellsElectrical EngineeringSemiconductor DeviceEngineeringSpecific ResistanceResistorNanoelectronicsElectronic EngineeringApplied PhysicsComputer EngineeringMicroelectronicsPhase Change MemoryInterconnect (Integrated Circuits)Complementary Resistive SwitchesPassive Crossbar Arrays
Recently, the sneak-path obstacle in passive crossbar arrays has been overcome by the invention of complementary resistive switches (CRSs) consisting of two bipolar antiserially connected memristive elements. Here, we demonstrate the vertical integration of CRS cells based on Cu/SiO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> /Pt bipolar resistive switches. CRS cells were fabricated and electrically characterized, showing high resistance ratios (R <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">off</sub> /R <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">on</sub> >; 1500) and fast switching speed (<; 120 μs). The results are one step further toward the realization of high-density passive nanocrossbar-array-based gigabit memory devices.
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