1c:I[776865,["/_next/static/chunks/bb923814e1f4d2e9.js","/_next/static/chunks/dd3ee9f5b7716ca6.js","/_next/static/chunks/4204a0ae82542ca8.js","/_next/static/chunks/30036bedc5269936.js","/_next/static/chunks/6e1aa89a642f40be.js","/_next/static/chunks/cd5e572bc3e4eb92.js","/_next/static/chunks/8ffd0b71567920d8.js","/_next/static/chunks/67ea6dfd21f16c5f.js","/_next/static/chunks/24eb4379f68013fd.js","/_next/static/chunks/b8cd775ffdf935bd.js","/_next/static/chunks/983103cd9eb7b428.js","/_next/static/chunks/d4ac9dcf27f6ff52.js","/_next/static/chunks/294b9525248c8e5f.js"],"Grid"] 1d:I[617291,["/_next/static/chunks/bb923814e1f4d2e9.js","/_next/static/chunks/dd3ee9f5b7716ca6.js","/_next/static/chunks/4204a0ae82542ca8.js","/_next/static/chunks/30036bedc5269936.js","/_next/static/chunks/6e1aa89a642f40be.js","/_next/static/chunks/cd5e572bc3e4eb92.js","/_next/static/chunks/8ffd0b71567920d8.js","/_next/static/chunks/67ea6dfd21f16c5f.js","/_next/static/chunks/24eb4379f68013fd.js","/_next/static/chunks/b8cd775ffdf935bd.js","/_next/static/chunks/983103cd9eb7b428.js","/_next/static/chunks/d4ac9dcf27f6ff52.js","/_next/static/chunks/294b9525248c8e5f.js"],"GridCol"] 1e:I[419806,["/_next/static/chunks/bb923814e1f4d2e9.js","/_next/static/chunks/dd3ee9f5b7716ca6.js","/_next/static/chunks/4204a0ae82542ca8.js","/_next/static/chunks/30036bedc5269936.js","/_next/static/chunks/6e1aa89a642f40be.js","/_next/static/chunks/cd5e572bc3e4eb92.js","/_next/static/chunks/8ffd0b71567920d8.js","/_next/static/chunks/67ea6dfd21f16c5f.js","/_next/static/chunks/24eb4379f68013fd.js","/_next/static/chunks/b8cd775ffdf935bd.js","/_next/static/chunks/983103cd9eb7b428.js","/_next/static/chunks/d4ac9dcf27f6ff52.js","/_next/static/chunks/294b9525248c8e5f.js"],"default"] 1f:T50e,This paper describes the design and development of a 6 degree of freedom robotic manipulator used in the assembly of three-dimensional MEMS (micro electromechanical systems) microstructures. The robot employs a highly innovative mechanical design for the rotational axes to provide unprecedented access to a microchip substrate for microassembly operations. The first three axes of the robotic manipulator are orthogonally mounted linear stages providing Cartesian positioning of the chips beneath the end effector (microgripper). A rotational stage (alpha) mounted on the distal end of these three Cartesian axes allows the MEMS chip to be rotated. Two more degrees of freedom (beta and gamma) are serially mounted to the base frame, allowing for two degrees of rotation of the end effector. This configuration permits assembly of micro-parts on the surface of a MEMS chip at any orientation angle to the surface, within the limits of the workspace of the manipulator and the resolution of the motors. The end effector employs a standard tungsten probe with a passive microgripper bonded to it, which is used for grasping micro-parts. A software system has been developed to allow automatic operation of the manipulator. Preliminary assembly tests confirm the usefulness of the proposed design20:T536, The concept of the complementary clamp piezoworm actuator with a diode-shunted delay circuit was experimentally verified through prototype testing. One clamp uses high voltage to grip and low voltage to release while the other clamp operates in reverse fashion. The resulting piezoworm actuator can be driven by a two-channel controller with the two clamps sharing the first channel and the extender piezoelectric stack using the second channel. The piezoworm achieved a speed of 440 $\mu$m/s and had a force capacity of 12.5 N when driven in open loop with trapezoidal waveforms. A delay circuit improved the force capacity from 12.5 to 14.7 N using a resistance of 1000 $\Omega$. A closed-loop tracking controller was developed for the prototype. It is shown that the prototype closed-loop system has a repeatability less than

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