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High-voltage silicon thin film transistor on quartz
22
Citations
1
References
1982
Year
Materials ScienceElectrical EngineeringEngineeringFabrication DetailsApplied PhysicsLaser-recrystallized PolysiliconSemiconductor Device FabricationThin FilmsSilicon On InsulatorMicroelectronicsOptoelectronicsThin Film ProcessingTft Characteristics
A high voltage enhancement-type thin film transistor (TFT) has been fabricated on quartz in layers of laser-recrystallized polysilicon. The fabrication details and TFT characteristics are described.
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