Deposition of NCD films using hot filament CVD and Ar/CH4/H2 gas mixtures - Concepedia

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Deposition of NCD films using hot filament CVD and Ar/CH4/H2 gas mixtures

77

Citations

18

References

2005

Year

Paul May, James A. Smith, Yu. A. Mankelevich

Diamond and Related Materials

Materials ScienceMaterials EngineeringChemical EngineeringNcd FilmsEngineeringSurface ScienceApplied PhysicsAr/ch4/h2 Gas MixturesThin FilmsPulsed Laser DepositionHot Filament CvdChemical DepositionChemical Vapor DepositionThin Film Processing

References

	Year	Citations

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