Publication | Open Access

Dynamic characterization of MEMS diaphragm using time averaged in-line digital holography

In-line Digital HolographyEngineeringMicromachinesMeasurementMechanicsMicroscopyMechanical EngineeringBiomechanicsMicrofabricationEducationDynamic CharacterizationHolographic MethodBiomedical EngineeringInstrumentationMicro-electromechanical SystemDigital Holography