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Non-destructive high-resolution X-ray imaging of ULSI micro-electronics using keV X-ray microscopy in Zernike phase contrast

DOI

11

Citations

4

References

2006

Year

U. Neuhäusler, Gerd Schneider
Microelectronic Engineering

References

YearCitations

Cryo X-ray microscopy with high spatial resolution in amplitude and phase contrast

Gerd Schneider

Ultramicroscopy

1998

285

X-ray microscopy in Zernike phase contrast mode at 4 keV photon energy with 60 nm resolution

U Neuh usler, Gerd Schneider, Wolfgang Ludwig,

Journal of Physics D Applied Physics

2003

73

Dynamical x-ray microscopy investigation of electromigration in passivated inlaid Cu interconnect structures

Gerd Schneider, Gregory Denbeaux, Erik H. Anderson,

Applied Physics Letters

2002

42

Phase contrast X-ray microscopy at 4 keV photon energy with 60 nm resolution

U. Neuhäusler, Gerd Schneider, Wolfgang Ludwig,

Journal de Physique IV (Proceedings)

2003

14

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