Micromachines · 2013 · 34 citations · 3 references
EngineeringMeasurementLiquid-liquid FlowFluid MechanicsFull Scale FlowFlow CellEducationGas-liquid FlowEarth ScienceFluid PropertiesCalibrationMicrometeorologyInclinometerInstrumentationMicrofluidicsPressure DropHydromechanicsMultiphase FlowTemperature DriftSensorsMass Flux MeasurementFlow Measurement
Coriolis mass flow meters inherently measure the density of the flowing medium. The study demonstrates a compact, ready‑to‑use micro Coriolis mass flow meter. The meter features a robust design with standard fluidic connections, USB readout via PC or laptop, and was tested on common gases and liquids. The meter achieves a full‑scale flow of 1 g/h, zero stability of 2 mg/h, 0.5 % accuracy for liquids and gases, temperature drift below 1 mg/h/°C, and density sensitivity of ~1 Hz·m³/kg.
In this paper we demonstrate a compact ready-to-use micro Coriolis mass flow meter. The full scale flow is 1 g/h (for water at a pressure drop < 1 bar). It has a zero stability of 2 mg/h and an accuracy of 0.5% reading for both liquids and gases. The temperature drift between 10 and 50 °C is below 1 mg/h/°C. The meter is robust, has standard fluidic connections and can be read out by means of a PC or laptop via USB. Its performance was tested for several common gases (hydrogen, helium, nitrogen, argon and air) and liquids (water and isopropanol). As in all Coriolis mass flow meters, the meter is also able to measure the actual density of the medium flowing through the tube. The sensitivity of the measured density is ~1 Hz.m3/kg.
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Micromachined flow sensors—a review
Nam‐Trung Nguyen · Flow Measurement and Instrumentation · 1997 · 384 citations
Highly sensitive micro coriolis mass flow sensor
Jeroen Haneveld, T.S.J. Lammerink, Marcel Dijkstra et al. · Proceedings, IEEE micro electro mechanical systems · 2008 · 40 citations
Engineering, Micromachines, Sensors +15