Highly sensitive micro coriolis mass flow sensor

Abstract

We have realized a micromachined micro Coriolis mass flow sensor consisting of a silicon nitride resonant tube of 40 mum diameter and 1.2 mum wall thickness. Actuation of the sensor in resonance mode is achieved by Lorentz forces. First measurements with both gas and liquid flow have demonstrated a resolution in the order of 10 milligram per hour. The sensor can simultaneously be used as a density sensor.