Applications of silicon nanowires functionalized with palladium nanoparticles in hydrogen sensors

Abstract

Silicon nanowires (SiNWs) modified by palladium (Pd) nanoparticles were investigated for hydrogen detection. SiNWs were fabricated via a thermal evaporation method using tin (Sn) as the catalyst. The as-grown SiNWs were chemically treated to remove surface oxide and then coated with a thin layer of Pd nanoparticles. A gas sensor device was fabricated with the Pd-functionalized SiNWs. The sensor showed better sensitivity to hydrogen and faster responding time than the macroscopic Pd wire hydrogen sensor.