Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1989 · 26 citations · 1 references
Natural SciencesChemistryMaterials ScienceMaterials ChemistrySurface ScienceThin FilmsChemical Vapor DepositionSurface PhysicsThin-film DepositionBoron ChemistryChemical Vapor Deposition MaterialsChemical Vapor Deposition PrecursorsNitride Thin FilmsNitrides DepositionNitrides Thin FilmsPlasma-enhanced Chemical Vapor Deposition
We have investigated photoassisted, plasma enhanced chemical vapor deposition and pyrolytic deposition of boron from decaborane (B10H14) and boron nitride from decaborane combined with nitrogen or ammonia. The use of decaborane for depositing boron and boron nitride thin films is seen as a viable alternative to diborane or boron halides.
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