Publication | Closed Access
A nanoindentation study of the mechanical properties of ZnO thin films on (0 0 0 1) sapphire
38
Citations
17
References
2006
Year
Materials ScienceMaterial AnalysisEngineeringMechanical PropertiesNanotechnologyOxide ElectronicsMechanical EngineeringApplied PhysicsGallium OxideZno Thin FilmsThin FilmsNanoindentation StudyMicrostructureThin Film Processing
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