Publication | Closed Access
A novel fabrication method of embedded micro-channels by using SU-8 thick-film photoresists
141
Citations
7
References
2002
Year
Su-8 Thick-film PhotoresistsEngineeringFlexible ElectronicsMicrofabricationApplied PhysicsMicroscale SystemIntegrated CircuitsBiomedical EngineeringMicro-optical ComponentNovel Fabrication MethodMicroelectronicsOptoelectronicsNanolithography MethodMicrofluidics
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