Monolithically fabricated polymermems 3-axis thermal accelerometers designed for automated wirebonder assembly

Abstract

This paper reports on two novel 3-axis thermal accelerometers based on different mechanical structures that are fabricated using polyimide PI-2611, and assembled using a standard wire-bonder. One accelerometer design has an un-amplified linear DC sensitivity of ±45μV/g, ±60μV/g, and ±35μV/g on the X, Y, and Z axes respectively. The second design has a sensitivity of ±17μV/g, ±8.5μV/g, and ±14μV/g respectively. Both accelerometers are assembled by applying a lateral push to each of the out-of-plane parts using an unmodified wirebonder. This paper will detail the fabrication, design, assembly, and functional results of the two 3-axis thermal accelerometer designs.