Wavelength-tunable microbolometers with metamaterial absorbers

Abstract

Microbolometers are modified by metallic resonant absorber elements, leading to an enhanced responsivity at selectable wavelengths. The dissipative energy absorption of tailored metamaterials allows for engineering the response of conventional bolometer microbridges. The absorption peak position and height are determined by the geometry of the metamaterial. Square-shaped metal/dielectric/metal stacks as absorber elements show spectral resonances at wavelengths between 4.8 and 7.0 microm in accordance with numerical simulations. Total peak absorptions of 0.8 are obtained. The metamaterial modified bolometers are suitable for multispectral thermal imaging systems in the mid-IR and terahertz regime.