Distributed-index planar microlens array prepared from deep electromigration

Abstract

Monolithic fabrication of a new distributed index planar microlens array by means of a deep electromigration technique in a glass substrate is reported. The array consists of distributed index lenses of 1.2 mm in diameter with 6.8 mm focal length. The focused spot is as small as 16 μm for λ=0.63 μm. The coupling efficiency of 60% to a multimode VAD fibre has been obtained.