High k<inf>t</inf><sup>2</sup>×Q, multi-frequency lithium niobate resonators

Abstract

This paper presents design and vacuum measurements of lithium niobate (LN) contour-mode resonators (CMR). By carefully positioning the interdigital transducer (IDT), we achieved CMRs with k <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">t</inf> <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> ×Q of 7%∗2150=148 (IDT @ node) or resonators with very high k <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">t</inf> <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> of 12.3% and spur-attenuated response (IDT @ anti-node). In addition, we demonstrated resonators with frequencies ranging from 400MHz to 800MHz on a single chip.