Development and analysis of the vertical capacitive accelerometer

Partitioned analysis of coupled mechanical systems

Carlos A. Felippa, K. C. Park, Charbel Farhat · Computer Methods in Applied Mechanics and Engineering · 2001 · 792 citations

Engineering, Mechanical Engineering, Systems Engineering +12

Mechanical design and optimization of capacitive micromachined switch

Jing‐Mei Huang, K.M. Liew, C.H. Wong et al. · Sensors and Actuators A Physical · 2001 · 216 citations

Engineering, Electrical Engineering, Mechanical Engineering +12

Modeling of an electrostatic torsional actuator: demonstrated with an RF MEMS switch

Robert Sattler, Florian Plötz, Gernot Fattinger et al. · Sensors and Actuators A Physical · 2002 · 67 citations

Engineering, Electrical Engineering, Physics +14

Sensitivity enhancement of MEMS inertial sensors using negative springs and active control

Martin Handtmann, Robert Aigner, A. Meckes et al. · Sensors and Actuators A Physical · 2002 · 38 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +16

A surface-micromachined tunable vibratory gyroscope

Yong-Soo Oh, Byeungleul Lee, Seogsoon Baek et al. · 2002 · 35 citations

Engineering, Mechanical Engineering, Instrumentation +16