Publication | Closed Access
Modeling of an electrostatic torsional actuator: demonstrated with an RF MEMS switch
67
Citations
7
References
2002
Year
Electrical EngineeringEngineeringElectrostatic Torsional ActuatorRadio Frequency Micro-electromechanical SystemsMechanical EngineeringMechanical SystemsNano Electro Mechanical SystemActuationElectronic-mechanical SystemMicroactuatorRf Mems SwitchMicro-electromechanical System
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