Realization of hybrid microfluidic systems using standard LTCC process

Abstract

The paper reports some results of a cooperation research in which the possibility to realize microfluidic components and modules by using low temperature cofiring ceramic multilayer (LTCC-ML) technology is examined. The main goal is the development of LTCC multilayer which are carrier for microfluidic Silicon components and combine electrical and fluidic functions. Also fluidic mixer elements and hybrid microvalves were developed. These different components are combined during the examinations to realize a microscope chamber. This is a fluidic microsystem to inspect and treatment smallest samples for life science applications. It can be used in high resolution microscopes. The microscope chamber consists of a LTCC manifold which contains fluidic channels and forms the carrier for assembled microfluidic and electric silicon components.