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All-fused-silica miniature optical fiber tip pressure sensor
182
Citations
11
References
2006
Year
Optical MaterialsEngineeringMechanical EngineeringBiomedical EngineeringSensor TechnologyInstrumentationMicrofluidicsMaterials SciencePhotonicsFiber Optic SensingFiber OpticOptical SensorsMiniature SensorMicrofabricationBioelectronicsAll-fused-silica Pressure SensorFiber TipSensor DesignOptical Sensor
An all-fused-silica pressure sensor fabricated directly onto a fiber tip of 125 microm diameter is described. Simple fabrication steps include only cleaving and fusion splicing. Because no chemical processes are involved, the fabrication is easy, safe, and cost effective. Issues in sensor design and loss analysis are discussed. The sensor has been tested for static pressure response, showing a sensitivity of 2.2 nm/psi, a resolution of 0.01 psi (68.9 Pa), a hysteresis of 0.025%, and capability of operation at temperatures up to 600 deegrees C. This miniature sensor may be suitable for medical diagnostics, environmental monitoring, and other industrial applications.
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