Journal of Electroceramics · 2007 · 13 citations · 5 references
EngineeringPower UltrasoundMicrofabricationMechanical EngineeringTransducer PrincipleInstrumentationUltrasoundMicromachined Ultrasonic Transducer
5
Development of piezoelectric micromachined ultrasonic transducers
Firas Akasheh, Todd Myers, J. Fraser et al. · Sensors and Actuators A Physical · 2004 · 250 citations
Robert Dorey, S.B. Stringfellow, R. W. Whatmore · Journal of the European Ceramic Society · 2002 · 92 citations
Materials Engineering, Materials Science, Electrical Engineering +7