IEEE Microwave and Guided Wave Letters · 2000 · 57 citations · 5 references
EngineeringElectrical EngineeringMicroelectromechanical SystemsMicroelectronicsMicrowave EngineeringMems DesignMems FabricationMicrowave Integrated CircuitsMicrowave Transmission LinesRadio-frequency Integrated CircuitsRf MemsCapacitorsCoplanar WaveguidesInsertion LossInsertion Loss ReductionMicrowave Phase Shifter DesignPhase ShiftersQuartzRf Mems Phase Shifters
A wideband distributed coplanar-waveguide (CPW) phase shifter has been developed for X-band operation. The design is based on the distributed MEMS transmission line (DMTL) loaded with MEMS bridges and MIM capacitors. A 2-bit distributed phase shifter was fabricated on a 500-μm quartz substrate, and achieved a true-time delay operation from 1 to 20 GHz with a reflection coefficient less than -11 dB from 2 to 20 GHz and above. Insertion loss is dominated by a low-Q MIM capacitor (14 at 10 GHz) and the effect of this Q is shown, Increasing the MIM capacitor Q will result in an excellent 2-bit phase shifter with wideband performance at X-band frequencies.
5
Low-loss distributed MEMS phase shifter
A. Borgioli, Yu Liu, A.S. Nagra et al. · IEEE Microwave and Guided Wave Letters · 2000 · 84 citations
Engineering, Electrical Engineering, Microelectromechanical Systems +15