3D Reconstruction of SPM Probes by Electron Tomography

Abstract

Three-dimensional morphological and compositional structures of tungsten tips consisting of layered amorphous oxide shell and crystalline W core are reconstructed by electron tomography using both coherent and incoherent imaging modes. The fidelity of the reconstruction is dependent on three criteria, suppression of unwanted crystal orientation contrast in the crystalline core, nonlinear intensity-thickness relations above a certain thickness limit, and artefacts due to missing angular ranges when acquiring a tilt series of images. Annular dark field (ADF), and EDX chemical mapping are discussed as alternatives to standard bright field (BF) TEM imaging.