Concepedia

Laser Photolytic Deposition of Thin Films

P. Boyer, C. A. Moore, Raj Solanki, W. K. Ritchie, G. A. Roche, G. J. Collins

MRS Proceedings · 1982 · 19 citations · 5 references

DOI

Concepts

References

5

The Deposition of Molybdenum and Tungsten Films from Vapor Decomposition of Carbonyls

L. Kaplan, F. M. d’Heurle · Journal of The Electrochemical Society · 1970 · 74 citations

, , +13

Laser photodeposition of refractory metals

Raj Solanki, P. Boyer, John E. Mahan et al. · Applied Physics Letters · 1981 · 68 citations

, , +17

Optically induced microstructures in laser-photodeposited metal films

Richard M. Osgood, D. J. Ehrlich · Optics Letters · 1982 · 50 citations

, , +8

Plasma-enhanced chemical vapor deposition of tungsten films

J. K. Chu, Chengcun Tang, Dennis W. Hess · Applied Physics Letters · 1982 · 29 citations

, , +17

VUV fluorescence following photodissociation of N2O at 193 nm

J. Zavelovich, M. Rothschild, W. Gornik et al. · The Journal of Chemical Physics · 1981 · 27 citations

, , +16